Low-pressure Plasma Coating System 低压等离子涂层系统

NW-CoatML

General 整体介绍

The NW-CoatML system is a medium-sized low-pressure plasma system capable of plasma coating components using liquid precursors. The components to be treated are put in trays, which are inserted into the vacuum chamber. NW-CoatML是一种中使用液态单体的低压的金年会 金字招牌诚信至上系统。处理产品时首先将产品放在托盘上，之后把托盘放入真空腔体进行处理。 The equipment operates in batches. 该设备是按照批次处理产品的。 The system is completely comprised in a welded and powder coated rigid steel frame. The frame is closed at the bottom (with a cut-out for the vacuum pump) as well as at the sides and is open at the top. Pump as well as fully enclosed electrical cabinet are comprised within the frame. 该系统使用全包的焊接框架结构。框架的底部有（用于安装真空泵的切口），其侧面是封闭的，顶部是开放的。真空泵以及电控柜完全包含在内部。

Applications 应用	Low-pressure plasma system NW-****M* (for reference only) 低压等离子系统NW-****M*（图片仅供参考）

Vacuum chamber 真空腔室	The process chamber is made of special grade aluminum with wall thickness of 30mm. All welds are done in several passes at the interior and exterior of the chamber, which assures a long-lasting vacuum tightness for the full lifespan of the machine, which can easily be over 20 years. 真空腔体由壁厚30mm特级铝制成。全部焊接在腔室的内部和外部分多次完成，这确保了机器的整个使用寿命（很容易超过 20 年），以及持久真空密封性。 The vacuum chamber has approximated inner dimensions of w900*d800*h1000 mm, bringing the internal volume to approximate 0,72m³ or 720 litre. 真空腔体的内部尺寸约为 长900*宽800*高1000 毫米，内部容积约为 0.72 立方米或 720 升。 The vacuum chamber contains the material to be treated (components) as well as the complete electrode setup needed to treat the material. 真空腔体内包含要处理的材料（组件）以及处理材料所需的完整电极结构。 The chamber has heated walls and is fully thermally insulated. 腔体壁具有加热功能并且完全隔热。 The chamber is closed with a swivelling door, which is operated manually and equipped with closing handles. The door O-ring is fixed using a proprietary design, allowing an easy & hassle- free exchange. The door is heated and fully thermally insulated. 腔体门配有把手，手动进行旋转开关。腔门密封圈使用专门的设计固定，同时，也可以轻松更换。墙门也是可以加热并且完全隔热的。
Vacuum pump 真空泵	The vacuum pump group consists of 2 pumps, both dry pumps. This type of pumps has aproven track record in the semiconductor processing industry. This water-cooled pump-combo delivers a pumping speed of 480m³/h. 真空泵由泵组构成，包含两个泵，均为干泵。这种泵在半导体加工领域有着很好的应用。该泵组使用水冷，可达480m³/h的抽速。
Vacuum valves/connection 真空阀门/连接	The chamber can be isolated from the pump through a heated and thermally insulated ISO100 angle valve. 腔体和真空泵之间通过一个可以加热且良好隔热的ISO100真空角阀。 All connections between pump, valves and chamber are made of stainless-steel grade 304, are electrically heated and thermally insulated. The pump connection is specifically designed to ensure homogeneous flow characteristics during the coating process. 泵、阀门和腔室之间的所有连接均由 304 级不锈钢制成，管路加热使用电加热，同时做好了绝热。专门设计的泵连接确保涂层过程中的均匀流动特性,从而保证产品处理的均匀性。
Pressure gauges 真空计	The system holds 3 independent pressure gauges: 系统包含3个独立的真空计 One atmosphere indicator 一个常压传感器 One Pirani gauge to control the pump cycle 一个皮拉尼真空计控制抽真空过程测量 One heated capacitance gauge to control process pressure The pressure gauges have protecting KF16 isolation valves. 一个薄膜规控制制成真空度。所有的真空计使用KF16隔离阀门保护。
Venting 排气	The system comes with a KF25 venting valve, equipped with a silencer/flow limiter 该系统配备一个 KF25 排气阀，配备消音器/流量限制器。
Gas delivery 气体输送	The system is equipped with 2 gas mass flow controller and 1 chamber purge line. Each line is equipped with an additional shut-off valve. The gas is delivered to every slot in the machine by means of a gas manifold. 该系统配备2个质量流量控制器和1个腔体吹扫管路。每一条气体输送管路都配有一个截止阀。气体通过气路输送至腔体。
Liquid delivery 液体输送	The system has standardly 1 LDM (Liquid Delivery Module) included. The LDM has all controls on board by its own internal PLC, which is connected to the main PLC of the system. It can easily be replaced by a spare LDM (plug-and-play). 该系统标准包含 1 个 LDM（液体输送模块）。 LDM 的所有控制都由其自己的内部 PLC 控制，该 PLC 连接到系统的主 PLC。 它可以很容易地被备用 LDM替换（即插即用）。 The LDM allows to bring the process liquid into the right condition before supplying it as a vapor to the coating process. The LDM is connected to the process chamber by a heated and thermally insulated process line. The vapor flow gets further distributed into every process slot, by means of a proprietary heated and thermally insulated manifold. 液体输送模块使单体在进入腔体进行工艺处理之前完全气化。LDM通过加热管路与腔体进行连接。通过合适的加热和热绝缘管路，可以很好的将单体气化，并进一步输送到真空腔室。
Plasma electrodes 等离子电极	The plasma electrode module is an assembly of RF-powered and ground electrodes. It offers standardly 6 slots to place a tray holding the components to be treated. In case of larger/higher components, the slots can be defined larger, which will result in lesser slots. 等离子点击模块包括射频供电及接地的电极组件。包括6个标准插槽，放置处理样品的托盘。对于更大的产品，可以定制更大的插槽，这就会导致插槽数量的减少。 Due to the modular setup, the machine can easily be changed over to a different geometry by switching the full plasma electrode module. 通过模块化的电极设计，设备可以进行整个模块化电极的更换。 The RF-powered electrodes are temperature controlled by a recirculating heat exchanger. 射频电极由循环热交换器控制温度。
Plasma generator 等离子发生器	The system is equipped with a 2kW 13,56MHZ RF generator. The RF power is transferred by an automatic matching network to the RF-electrodes. 该系统配备了一个 2kW 13.56MHZ 射频发生器。 射频功率通过自动匹配网络传输到射频电极,进行自动功率匹配。
Component loading 产品上料	Parts to be treated are positioned in a tray. These trays are equipped with wheels. The trays are inserted in between the electrodes, using a rail system inside the chamber. The rail system is integrated in the plasma electrode module. 需要处理的产品放置在托盘中。托盘是配有轮子的。使用腔室内的导轨系统将托盘插入电极之间。 导轨系统集成在等离子电极模块之间。 Useable size of the trays (inner dimension) is approximately 700*600mm. The system can hold up to 6 trays. Maximum height for components in the standard setup is 40mm. 托盘的可用尺寸（内部尺寸）约为 700*600mm。 该系统最多可容纳 6 个托盘。 标准设置中可处理的最大高度为 40 毫米。
System controls 控制系统	The system is fully controlled by a PLC. Automatic processing and alarming functions are fully mastered by the PLC, independent of the HMI Operator interaction happens through the HMI. 该系统完全由PLC控制。 自动处理和报警功能完全由 PLC 掌握。操作人员通过人机界面进行设备的操作。 The HMI is a 17” industrial touch screen PC and offers a very comprehensive and intuitive interface with the user. Depending on the allocated user-level, it allows to run the machine in manual or automatic mode, program process recipes or alter system settings. The HMI is also taking care of the optional historical data logging with exporting functions and standardly allows for remote access support over the internet. HMI 是一个 17 英寸的工业触摸屏 PC，为用户提供了一个非常全面和直观的界面。 用户进入不同的级别，可以在手动或自动模式下运行机器、修稿配方或更改系统设置。 HMI 还通过导出功能导出历史数据记录，并允许通过 Internet 进行远程访问支持。 Status feedback is also provided through a 5-fold LED signal lamp and buzzer 设备运行状态可以通过LED灯和蜂鸣器进行快速掌握。
Certification 认证	The equipment is CE certified 设备通过CE认证
Warranty 质保	The warranty period is 12 months 保修期为12个月
Options 选件	Several options available: extra gas lines, extra sets of trays, frame top cover, manual loading trolley, ERP/MES integration, automatic loading 提供多种选择：额外的气体管路、额外的托盘组、框架顶盖、手动装载手推车, ERP/MES 集成, 自动装载装置
Characteristics 设备参数：
Electrical 电力供应	3*400V+N+PE at 60A
Compressed air 压缩空气	6-8 bar
Clean and dried air according class4 specification of ISO standard 8573.1 根据ISO 8573.1标准
Cooling water 冷却水	20°C 20 liter/minute at 2 bar 2bar压力情况下20升/分钟 Clear & soft water, free of particles 洁净水，没有粒子 Cooling power 6kW 冷却功率6kW
Process gas 工艺气体	Purity>99,95% 纯度＞99.95% Pressure : 1-2 bar 压力1-2bar
Exhaust 尾气排放	Direct tube to the outside through KF40 flange or hose inner diameter 38mm 通过KF40法兰或内径38mm软管连接
Connectivity 网络连接	(Proxy-free) internet line 互联网
Dimensions 设备尺寸	2200*16000*1920 (+250 signal light) mm (l*w*h)
Weight 设备重量	2000 kg